Normal and cancerous tissue have changing values of Electrical Impedance Spectroscopy (EIS). In which with comparing their impedance spectrum with bio-impedance measuring system, they can be used for cancerous tissue diagnosis. Probe is the main part in electrical impedance measurement system. In this paper by employing finite element method EIS factor of mucous tissue derived in 5 different probes. Results of investigation with these probe models were presented with studying on their sensitivity to conducting film thickness and acquired resolution. Optimization results were used to select the most efficient one.
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