en Comprehensive Electromechanical Analysis of MEMS Variable Gap Capacitors کنترل Control پژوهشي Research <p><em>This paper presents a comprehensive case study on electro-mechanical analysis of MEMS<a href="#_ftn1" name="_ftnref1" title=""><strong>[1]</strong></a> variable capacitors. Using the fundamental mechanical and electrical equations, static and dynamic behaviors of the device are studied. The analysis is done for three different modes, namely: dc (static mode), small signal ac and large signal regime. A complete set of equations defining dynamic behavior of the MEMS, and an ac small signal equivalent circuit are presented. The mathematical models are defined and examined by the Matlab Simulink and a complete set of simulation results is reported for various cases separately. The results of this study would be useful in design and analysis of the MEMS based circuits which have some kind of mechanical dynamic action. Some examples of such devices may include VCO<a href="#_ftn2" name="_ftnref2" title=""><strong>[2]</strong></a>s, frequency modulators, tunable filters and parametric effect circuits.</em></p> <div>&nbsp; <hr align="left" size="1" width="33%" > <div id="ftn1"> <p><a href="#_ftnref1" name="_ftn1" title="">[1]</a> - Micro Electro Mechanical System</p> </div> <div id="ftn2"> <p><a href="#_ftnref2" name="_ftn2" title="">[2]</a> - Voltage Controlled Oscillator</p> </div> </div> <p><em>This paper presents a comprehensive case study on electro-mechanical analysis of MEMS<a href="#_ftn1" name="_ftnref1" title=""><strong>[1]</strong></a> variable capacitors. Using the fundamental mechanical and electrical equations, static and dynamic behaviors of the device are studied. The analysis is done for three different modes, namely: dc (static mode), small signal ac and large signal regime. A complete set of equations defining dynamic behavior of the MEMS, and an ac small signal equivalent circuit are presented. The mathematical models are defined and examined by the Matlab Simulink and a complete set of simulation results is reported for various cases separately. The results of this study would be useful in design and analysis of the MEMS based circuits which have some kind of mechanical dynamic action. Some examples of such devices may include VCO<a href="#_ftn2" name="_ftnref2" title=""><strong>[2]</strong></a>s, frequency modulators, tunable filters and parametric effect circuits.</em></p> <div>&nbsp; <hr align="left" size="1" width="33%" > <div id="ftn1"> <p><a href="#_ftnref1" name="_ftn1" title="">[1]</a> - Micro Electro Mechanical System</p> </div> <div id="ftn2"> <p><a href="#_ftnref2" name="_ftn2" title="">[2]</a> - Voltage Controlled Oscillator</p> </div> </div> MEMS, Variable capacitors, Electro-mechanical modeling MEMS, Variable capacitors, Electro-mechanical modeling 3 9 http://jiaeee.com/browse.php?a_code=A-10-1-190&slc_lang=en&sid=1 Hooman Nabovati Hooman Nabovati 1003194753284600680 1003194753284600680 Yes Khalil Mafinezhad Mafinezhad 1003194753284600681 1003194753284600681 No Aydin Nabovati Aydin Nabovati 1003194753284600682 1003194753284600682 No Hosseyn Keshmir Hosseyn Keshmir 1003194753284600683 1003194753284600683 No